High-Sensitivity CMOS-Integrated Floating Gate-Based UVC Sensors.

We report on novel UVC sensors based on the floating gate (FG) discharge principle. The device operation is similar to that of EPROM non-volatile memories UV erasure, but the sensitivity to ultraviolet light is strongly increased by using single polysilicon devices of special design with low FG capacitance and long gate periphery (grilled cells). The devices were integrated without additional masks into a standard CMOS process flow featuring a UV-transparent back end. Low-cost integrated UVC solar blind sensors were optimized for implementation in UVC sterilization systems, where they provided feedback on the radiation dose sufficient for disinfection. Doses of ~10 µJ/cm2 at 220 nm could be measured in less than a second. The device can be reprogrammed up to 10,000 times and used to control ~10-50 mJ/cm2 UVC radiation doses typically employed for surface or air disinfection. Demonstrators of integrated solutions comprising UV sources, sensors, logics, and communication means were fabricated. Compared with the existing silicon-based UVC sensing devices, no degradation effects that limit the targeted applications were observed. Other applications of the developed sensors, such as UVC imaging, are also discussed.

Device for Identifying the UV Emission Spectrum.

Nowadays, the disinfection of classrooms, shopping malls, and offices has become an important part of our lives. One of the most effective disinfection methods is ultraviolet (UV) radiation. To ensure the disinfection device has the required wavelength spectrum, we need to measure it with dedicated equipment. Thus, in this work, we present the development of a UV spectrum detector capable of identifying UV wavelength spectrums, with a wide range of probes and the ability to transmit data to a PC for later evaluation of the results. The device was developed with four UV sensors: one for UV-A, one for UV-B, one for UV-C, and one with a wide range of detection of UVA, with a built-in transimpedance amplifier. An Arduino Nano development board processes all the acquired data. We developed a custom light source containing seven UV LEDs with different central wavelengths to calibrate the device. For easy visualization of the results, custom PC software was developed in the Processing programming medium. For the two pieces of electronics-the UV detector and calibration device-3D-printed housings were created to be ergonomic for the end-user. From the price point of view, this device is affordable compared to what we can find on the market.

Embedded UV Sensors in CMOS SOI Technology.

We report on ultraviolet (UV) sensors employing high voltage PIN lateral photodiode strings integrated into the production RF SOI (silicon on isolator) CMOS platform. The sensors were optimized for applications that require measurements of short wavelength ultraviolet (UVC) radiation under strong visible and near-infrared lights, such as UV used for sterilization purposes, e.g., COVID-19 disinfection. Responsivity above 0.1 A/W in the UVC range was achieved, and improved blindness to visible and infrared (IR) light demonstrated by implementing back-end dielectric layers transparent to the UV, in combination with differential sensing circuits with polysilicon UV filters. Degradation of the developed sensors under short wavelength UV was investigated and design and operation regimes allowing decreased degradation were discussed. Compared with other embedded solutions, the current design is implemented in a mass-production CMOS SOI technology, without additional masks, and has high sensitivity in UVC.